Ceramic(Y2O3, YA30 & Al2O3) Part

Description GAS INJECTOR
Meterial A₂O₃ > 99.5%
Specification ∅4.47 ⅹ ∅36.19 ⅹ 90.8L

High-purity(>99.7%), good plasma resistance

Y2O3 Nozzle

YA30 Gas Injector