Coatings Biz / Cleaning & Facility System

The concept of precision cleaning

A technology which removes the fine contaminants on the various types of parts in the production process of Semiconductor / Display / Solar Cell / LED etc. (Technology for cleaning with chemicals suitable for parts and regeneration/restore technology equivalent to Class A)

Customer Needs of Precision Cleaning

  • Precision cleaning technology for each part according to line width refinement
  • Removal of substances that become particle sources, ion contamination sources, etc.
  • Regeneration technology for minimizing changes in the surface condition of the part base material and restoring LIFE-TIME

Application Fields

  • Y2O3 Parts , ESC , SI , SIC , SUS , Al , Ceramic

Quartz : Poly-Sl Cleaning

200,300mm ESC Cleaning Solution

Vacuum ESC Cleaning Solution

CU Cleaning

불산 대체제 Chemical

Electrolytic polishing Cleaning

Turbo molecular pump Cleaning

Ceramic Cleaning

Total Cleaning Solution

Provides parts restoration by special cleaning suitable for parts per used process

Ceramic

  • Before Cleaning
  • After Cleaning

Quartz

  • Before Cleaning
  • After Cleaning

SCI

  • Before Cleaning
  • After Cleaning

Anodizing

  • Before Cleaning
  • After Cleaning

Piping Products

  • Before Cleaning
  • After Cleaning

SUS Assembly

  • Before Cleaning
  • After Cleaning

SUS Plate

  • Before Cleaning
  • After Cleaning

AL Products

  • Before Cleaning
  • After Cleaning

SUS Shield

  • Before Cleaning
  • After Cleaning

APS Spray Coating

  • Wood : Since it can be applied regardless of the type of base material, it is possible to select a variety of desired products, and because the film formation speed is fast, it is possible to produce a thick film, so it has various advantages that can be used as a functional material.
  • Description : This is a coating operation that fine particles which was accelerated by the compressed air due to melted spray film adheres and stacks up on the base material.

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Plasma Spray Coating - Mechanism

The coating is performed by the physical interface between the coating material and the base material caused when the coating material collides on the material surface which shrinks and solidifies due to heat loss

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